Semiconductor Sensors

  • Publish Date: 1994-10-13
  • Binding: Hardcover
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  • $25.16
  • Regular price $254.54


An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.



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