The Physics of Moire Metrology

  • Publish Date: 1990-01-17
  • Binding: Hardcover
  • Author: Oded Kafri;Ilana Glatt
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This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry. It is shown that for every interferometric technique in metrology, there is an analogous technique in moire metrology and vice versa, and that scientists involved in optical metrology have a real choice between interferometric and moire methods.